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Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems
Foundations of MEMS 2nd By Chang Liu (International Economy Edition)
Microsystem Design
Practical MEMS: Analysis and Design of Microsystems, MEMS Sensors (accelerometers, Pressure Sensors, Gyroscopes), Sensor Electronics, Actuators, RF MEMS, Optical MEMS, and Microfluidic Systems
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